2/16/2010	8:14:41 AM	Bypass valve closed
2/16/2010	8:14:42 AM	Main Vac valve closed
2/16/2010	8:14:51 AM	Bypass valve opened
2/16/2010	8:14:52 AM	Main Vac valve opened
2/16/2010	8:14:56 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	8:14:57 AM	H2 valve closed
2/16/2010	8:14:57 AM	BCl3 valve closed
2/16/2010	8:14:57 AM	PH3 valve closed
2/16/2010	8:14:57 AM	SiCl4 pre valve closed
2/16/2010	8:14:57 AM	SiCl4 post valve closed
2/16/2010	8:14:57 AM	Main Vac valve closed
2/16/2010	8:14:57 AM	Bypass valve closed
2/16/2010	8:14:57 AM	Bubbler valve closed
2/16/2010	8:14:57 AM	Helium valve opened
2/16/2010	8:14:57 AM	Helium MFC set to  500.000000
2/16/2010	8:14:57 AM	H2 MFC set to  0.000000
2/16/2010	8:14:57 AM	BCl3 MFC set to  0.000000
2/16/2010	8:14:57 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:14:57 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:14:57 AM	Tube furnace set to 0
2/16/2010	8:14:57 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:16:19 AM	Helium valve closed
2/16/2010	8:16:19 AM	H2 valve closed
2/16/2010	8:16:19 AM	BCl3 valve closed
2/16/2010	8:16:19 AM	PH3 valve closed
2/16/2010	8:16:19 AM	SiCl4 pre valve closed
2/16/2010	8:16:19 AM	SiCl4 post valve closed
2/16/2010	8:16:19 AM	Main Vac valve closed
2/16/2010	8:16:19 AM	Bypass valve closed
2/16/2010	8:16:19 AM	Bubbler valve closed
2/16/2010	8:16:19 AM	Helium MFC set to  0.000000
2/16/2010	8:16:19 AM	H2 MFC set to  0.000000
2/16/2010	8:16:19 AM	BCl3 MFC set to  0.000000
2/16/2010	8:16:19 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:16:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:16:19 AM	Tube furnace set to 0
2/16/2010	8:16:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:16:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	8:22:06 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	8:22:06 AM	Helium valve closed
2/16/2010	8:22:06 AM	H2 valve closed
2/16/2010	8:22:06 AM	BCl3 valve closed
2/16/2010	8:22:06 AM	PH3 valve closed
2/16/2010	8:22:06 AM	SiCl4 pre valve closed
2/16/2010	8:22:06 AM	SiCl4 post valve closed
2/16/2010	8:22:06 AM	Main Vac valve closed
2/16/2010	8:22:06 AM	Bubbler valve closed
2/16/2010	8:22:06 AM	Bypass valve opened
2/16/2010	8:22:06 AM	Helium MFC set to  0.000000
2/16/2010	8:22:06 AM	H2 MFC set to  0.000000
2/16/2010	8:22:06 AM	BCl3 MFC set to  0.000000
2/16/2010	8:22:06 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:22:06 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:22:06 AM	Tube furnace set to 0
2/16/2010	8:22:06 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:22:34 AM	Helium valve closed
2/16/2010	8:22:34 AM	H2 valve closed
2/16/2010	8:22:34 AM	BCl3 valve closed
2/16/2010	8:22:34 AM	PH3 valve closed
2/16/2010	8:22:34 AM	SiCl4 pre valve closed
2/16/2010	8:22:34 AM	SiCl4 post valve closed
2/16/2010	8:22:34 AM	Bubbler valve closed
2/16/2010	8:22:34 AM	Main Vac valve opened
2/16/2010	8:22:34 AM	Bypass valve opened
2/16/2010	8:22:34 AM	Helium MFC set to  0.000000
2/16/2010	8:22:34 AM	H2 MFC set to  0.000000
2/16/2010	8:22:34 AM	BCl3 MFC set to  0.000000
2/16/2010	8:22:34 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:22:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:22:34 AM	Tube furnace set to 0
2/16/2010	8:22:34 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:22:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	8:23:21 AM	Bypass valve closed
2/16/2010	8:23:23 AM	Main Vac valve closed
2/16/2010	8:23:32 AM	Bypass valve opened
2/16/2010	8:23:33 AM	Main Vac valve opened
2/16/2010	8:23:34 AM	Helium valve opened
2/16/2010	8:23:37 AM	Helium MFC set to  100.000000
2/16/2010	8:25:37 AM	Helium valve closed
2/16/2010	8:26:14 AM	Bypass valve closed
2/16/2010	8:26:14 AM	Main Vac valve closed
2/16/2010	8:26:24 AM	Bypass valve opened
2/16/2010	8:26:25 AM	Main Vac valve opened
2/16/2010	8:29:00 AM	Recipe started at 8:29 AM
2/16/2010	8:29:00 AM	Helium valve closed
2/16/2010	8:29:00 AM	BCl3 valve closed
2/16/2010	8:29:00 AM	PH3 valve closed
2/16/2010	8:29:00 AM	SiCl4 pre valve closed
2/16/2010	8:29:00 AM	SiCl4 post valve closed
2/16/2010	8:29:00 AM	Main Vac valve closed
2/16/2010	8:29:00 AM	Bypass valve closed
2/16/2010	8:29:00 AM	Bubbler valve closed
2/16/2010	8:29:00 AM	H2 valve opened
2/16/2010	8:29:00 AM	Helium MFC set to  0.000000
2/16/2010	8:29:00 AM	H2 MFC set to  500.000000
2/16/2010	8:29:00 AM	BCl3 MFC set to  0.000000
2/16/2010	8:29:00 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:29:00 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:29:00 AM	Tube furnace set to 0
2/16/2010	8:29:00 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:30:18 AM	Helium valve closed
2/16/2010	8:30:18 AM	BCl3 valve closed
2/16/2010	8:30:18 AM	PH3 valve closed
2/16/2010	8:30:18 AM	SiCl4 pre valve closed
2/16/2010	8:30:18 AM	SiCl4 post valve closed
2/16/2010	8:30:18 AM	Main Vac valve closed
2/16/2010	8:30:18 AM	Bypass valve closed
2/16/2010	8:30:18 AM	H2 valve opened
2/16/2010	8:30:18 AM	Bubbler valve opened
2/16/2010	8:30:18 AM	Helium MFC set to  0.000000
2/16/2010	8:30:18 AM	H2 MFC set to  500.000000
2/16/2010	8:30:18 AM	BCl3 MFC set to  0.000000
2/16/2010	8:30:18 AM	SiCl4 MFC set to  0.000000
2/16/2010	8:30:18 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:30:18 AM	Tube furnace set to 0
2/16/2010	8:30:18 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:50:18 AM	Helium valve closed
2/16/2010	8:50:18 AM	PH3 valve closed
2/16/2010	8:50:18 AM	Main Vac valve closed
2/16/2010	8:50:18 AM	Bypass valve closed
2/16/2010	8:50:18 AM	H2 valve opened
2/16/2010	8:50:18 AM	BCl3 valve opened
2/16/2010	8:50:18 AM	SiCl4 pre valve opened
2/16/2010	8:50:18 AM	SiCl4 post valve opened
2/16/2010	8:50:18 AM	Bubbler valve opened
2/16/2010	8:50:18 AM	Helium MFC set to  0.000000
2/16/2010	8:50:18 AM	H2 MFC set to  500.000000
2/16/2010	8:50:18 AM	BCl3 MFC set to  50.000000
2/16/2010	8:50:18 AM	SiCl4 MFC set to  325.000000
2/16/2010	8:50:18 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	8:50:18 AM	Tube furnace set to 0
2/16/2010	8:50:18 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:10:19 AM	H2 valve closed
2/16/2010	9:10:19 AM	BCl3 valve closed
2/16/2010	9:10:19 AM	PH3 valve closed
2/16/2010	9:10:19 AM	SiCl4 pre valve closed
2/16/2010	9:10:19 AM	SiCl4 post valve closed
2/16/2010	9:10:19 AM	Main Vac valve closed
2/16/2010	9:10:19 AM	Bypass valve closed
2/16/2010	9:10:19 AM	Helium valve opened
2/16/2010	9:10:19 AM	Bubbler valve opened
2/16/2010	9:10:19 AM	Helium MFC set to  500.000000
2/16/2010	9:10:19 AM	H2 MFC set to  0.000000
2/16/2010	9:10:19 AM	BCl3 MFC set to  0.000000
2/16/2010	9:10:19 AM	SiCl4 MFC set to  0.000000
2/16/2010	9:10:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:10:19 AM	Tube furnace set to 0
2/16/2010	9:10:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:30:19 AM	Helium valve closed
2/16/2010	9:30:19 AM	H2 valve closed
2/16/2010	9:30:19 AM	BCl3 valve closed
2/16/2010	9:30:19 AM	PH3 valve closed
2/16/2010	9:30:19 AM	SiCl4 pre valve closed
2/16/2010	9:30:19 AM	SiCl4 post valve closed
2/16/2010	9:30:19 AM	Main Vac valve closed
2/16/2010	9:30:19 AM	Bypass valve closed
2/16/2010	9:30:19 AM	Bubbler valve closed
2/16/2010	9:30:19 AM	Helium MFC set to  0.000000
2/16/2010	9:30:19 AM	H2 MFC set to  0.000000
2/16/2010	9:30:19 AM	BCl3 MFC set to  0.000000
2/16/2010	9:30:19 AM	SiCl4 MFC set to  0.000000
2/16/2010	9:30:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:30:19 AM	Tube furnace set to 0
2/16/2010	9:30:19 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:30:19 AM	Run finished at 9:30 AM
2/16/2010	9:34:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	9:34:03 AM	Helium valve closed
2/16/2010	9:34:03 AM	H2 valve closed
2/16/2010	9:34:03 AM	BCl3 valve closed
2/16/2010	9:34:03 AM	PH3 valve closed
2/16/2010	9:34:03 AM	SiCl4 pre valve closed
2/16/2010	9:34:03 AM	SiCl4 post valve closed
2/16/2010	9:34:03 AM	Main Vac valve closed
2/16/2010	9:34:03 AM	Bubbler valve closed
2/16/2010	9:34:03 AM	Bypass valve opened
2/16/2010	9:34:03 AM	Helium MFC set to  0.000000
2/16/2010	9:34:03 AM	H2 MFC set to  0.000000
2/16/2010	9:34:03 AM	BCl3 MFC set to  0.000000
2/16/2010	9:34:03 AM	SiCl4 MFC set to  0.000000
2/16/2010	9:34:03 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:34:03 AM	Tube furnace set to 0
2/16/2010	9:34:03 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:34:32 AM	Helium valve closed
2/16/2010	9:34:32 AM	H2 valve closed
2/16/2010	9:34:32 AM	BCl3 valve closed
2/16/2010	9:34:32 AM	PH3 valve closed
2/16/2010	9:34:32 AM	SiCl4 pre valve closed
2/16/2010	9:34:32 AM	SiCl4 post valve closed
2/16/2010	9:34:32 AM	Bubbler valve closed
2/16/2010	9:34:32 AM	Main Vac valve opened
2/16/2010	9:34:32 AM	Bypass valve opened
2/16/2010	9:34:32 AM	Helium MFC set to  0.000000
2/16/2010	9:34:32 AM	H2 MFC set to  0.000000
2/16/2010	9:34:32 AM	BCl3 MFC set to  0.000000
2/16/2010	9:34:32 AM	SiCl4 MFC set to  0.000000
2/16/2010	9:34:32 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:34:32 AM	Tube furnace set to 0
2/16/2010	9:34:32 AM	Bypass solenoid MFC set to  0.000000
2/16/2010	9:34:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	9:50:51 AM	Program started after a nonstandard shutdown
2/16/2010	9:50:51 AM	Helium valve closed
2/16/2010	9:50:51 AM	H2 valve closed
2/16/2010	9:50:51 AM	BCl3 valve closed
2/16/2010	9:50:51 AM	PH3 valve closed
2/16/2010	9:50:51 AM	SiCl4 pre valve closed
2/16/2010	9:50:51 AM	SiCl4 post valve closed
2/16/2010	9:50:51 AM	Main Vac valve closed
2/16/2010	9:50:51 AM	Bypass valve closed
2/16/2010	9:50:51 AM	Bubbler valve closed
2/16/2010	9:50:51 AM	Helium MFC set to  0.000000
2/16/2010	9:50:51 AM	H2 MFC set to  0.000000
2/16/2010	9:50:51 AM	BCl3 MFC set to  0.000000
2/16/2010	9:50:51 AM	SiCl4 MFC set to  0.000000
2/16/2010	9:50:51 AM	Bypass solenoid MFC set to  760.000000
2/16/2010	9:50:51 AM	Tube furnace set to 0
2/16/2010	9:50:51 AM	Bypass solenoid MFC set to  760.000000
2/16/2010	9:50:52 AM	Bypass valve opened
2/16/2010	9:50:52 AM	Main Vac valve opened
2/16/2010	1:04:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	1:04:09 PM	H2 valve closed
2/16/2010	1:04:09 PM	BCl3 valve closed
2/16/2010	1:04:09 PM	PH3 valve closed
2/16/2010	1:04:09 PM	SiCl4 pre valve closed
2/16/2010	1:04:09 PM	SiCl4 post valve closed
2/16/2010	1:04:09 PM	Main Vac valve closed
2/16/2010	1:04:09 PM	Bypass valve closed
2/16/2010	1:04:09 PM	Bubbler valve closed
2/16/2010	1:04:09 PM	Helium valve opened
2/16/2010	1:04:09 PM	Helium MFC set to  500.000000
2/16/2010	1:04:09 PM	H2 MFC set to  0.000000
2/16/2010	1:04:09 PM	BCl3 MFC set to  0.000000
2/16/2010	1:04:09 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:04:09 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:04:09 PM	Tube furnace set to 0
2/16/2010	1:04:09 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:05:07 PM	Helium valve closed
2/16/2010	1:05:07 PM	H2 valve closed
2/16/2010	1:05:07 PM	BCl3 valve closed
2/16/2010	1:05:07 PM	PH3 valve closed
2/16/2010	1:05:07 PM	SiCl4 pre valve closed
2/16/2010	1:05:07 PM	SiCl4 post valve closed
2/16/2010	1:05:07 PM	Main Vac valve closed
2/16/2010	1:05:07 PM	Bypass valve closed
2/16/2010	1:05:07 PM	Bubbler valve closed
2/16/2010	1:05:07 PM	Helium MFC set to  0.000000
2/16/2010	1:05:07 PM	H2 MFC set to  0.000000
2/16/2010	1:05:07 PM	BCl3 MFC set to  0.000000
2/16/2010	1:05:07 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:05:07 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:05:07 PM	Tube furnace set to 0
2/16/2010	1:05:07 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:05:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	1:09:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	1:09:20 PM	Helium valve closed
2/16/2010	1:09:20 PM	H2 valve closed
2/16/2010	1:09:20 PM	BCl3 valve closed
2/16/2010	1:09:20 PM	PH3 valve closed
2/16/2010	1:09:20 PM	SiCl4 pre valve closed
2/16/2010	1:09:20 PM	SiCl4 post valve closed
2/16/2010	1:09:20 PM	Main Vac valve closed
2/16/2010	1:09:20 PM	Bubbler valve closed
2/16/2010	1:09:20 PM	Bypass valve opened
2/16/2010	1:09:20 PM	Helium MFC set to  0.000000
2/16/2010	1:09:20 PM	H2 MFC set to  0.000000
2/16/2010	1:09:20 PM	BCl3 MFC set to  0.000000
2/16/2010	1:09:20 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:09:20 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:09:20 PM	Tube furnace set to 0
2/16/2010	1:09:20 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:09:50 PM	Helium valve closed
2/16/2010	1:09:50 PM	H2 valve closed
2/16/2010	1:09:50 PM	BCl3 valve closed
2/16/2010	1:09:50 PM	PH3 valve closed
2/16/2010	1:09:50 PM	SiCl4 pre valve closed
2/16/2010	1:09:50 PM	SiCl4 post valve closed
2/16/2010	1:09:50 PM	Bubbler valve closed
2/16/2010	1:09:50 PM	Main Vac valve opened
2/16/2010	1:09:50 PM	Bypass valve opened
2/16/2010	1:09:50 PM	Helium MFC set to  0.000000
2/16/2010	1:09:50 PM	H2 MFC set to  0.000000
2/16/2010	1:09:50 PM	BCl3 MFC set to  0.000000
2/16/2010	1:09:50 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:09:50 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:09:50 PM	Tube furnace set to 0
2/16/2010	1:09:50 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:09:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	1:23:54 PM	Main Vac valve closed
2/16/2010	1:23:56 PM	Bypass valve closed
2/16/2010	1:24:08 PM	Bypass valve opened
2/16/2010	1:24:09 PM	Main Vac valve opened
2/16/2010	1:25:07 PM	Recipe started at 1:25 PM
2/16/2010	1:25:07 PM	Helium valve closed
2/16/2010	1:25:07 PM	BCl3 valve closed
2/16/2010	1:25:07 PM	PH3 valve closed
2/16/2010	1:25:07 PM	SiCl4 pre valve closed
2/16/2010	1:25:07 PM	SiCl4 post valve closed
2/16/2010	1:25:07 PM	Main Vac valve closed
2/16/2010	1:25:07 PM	Bypass valve closed
2/16/2010	1:25:07 PM	Bubbler valve closed
2/16/2010	1:25:07 PM	H2 valve opened
2/16/2010	1:25:07 PM	Helium MFC set to  0.000000
2/16/2010	1:25:07 PM	H2 MFC set to  500.000000
2/16/2010	1:25:07 PM	BCl3 MFC set to  0.000000
2/16/2010	1:25:07 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:25:07 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:25:07 PM	Tube furnace set to 0
2/16/2010	1:25:07 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:26:29 PM	Helium valve closed
2/16/2010	1:26:29 PM	BCl3 valve closed
2/16/2010	1:26:29 PM	PH3 valve closed
2/16/2010	1:26:29 PM	SiCl4 pre valve closed
2/16/2010	1:26:29 PM	SiCl4 post valve closed
2/16/2010	1:26:29 PM	Main Vac valve closed
2/16/2010	1:26:29 PM	Bypass valve closed
2/16/2010	1:26:29 PM	H2 valve opened
2/16/2010	1:26:29 PM	Bubbler valve opened
2/16/2010	1:26:29 PM	Helium MFC set to  0.000000
2/16/2010	1:26:29 PM	H2 MFC set to  500.000000
2/16/2010	1:26:29 PM	BCl3 MFC set to  0.000000
2/16/2010	1:26:29 PM	SiCl4 MFC set to  0.000000
2/16/2010	1:26:29 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:26:29 PM	Tube furnace set to 0
2/16/2010	1:26:29 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:46:29 PM	Helium valve closed
2/16/2010	1:46:29 PM	BCl3 valve closed
2/16/2010	1:46:29 PM	PH3 valve closed
2/16/2010	1:46:29 PM	Main Vac valve closed
2/16/2010	1:46:29 PM	Bypass valve closed
2/16/2010	1:46:29 PM	H2 valve opened
2/16/2010	1:46:29 PM	SiCl4 pre valve opened
2/16/2010	1:46:29 PM	SiCl4 post valve opened
2/16/2010	1:46:29 PM	Bubbler valve opened
2/16/2010	1:46:29 PM	Helium MFC set to  0.000000
2/16/2010	1:46:29 PM	H2 MFC set to  500.000000
2/16/2010	1:46:29 PM	BCl3 MFC set to  0.000000
2/16/2010	1:46:29 PM	SiCl4 MFC set to  325.000000
2/16/2010	1:46:29 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	1:46:29 PM	Tube furnace set to 0
2/16/2010	1:46:29 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:06:30 PM	H2 valve closed
2/16/2010	2:06:30 PM	BCl3 valve closed
2/16/2010	2:06:30 PM	PH3 valve closed
2/16/2010	2:06:30 PM	SiCl4 pre valve closed
2/16/2010	2:06:30 PM	SiCl4 post valve closed
2/16/2010	2:06:30 PM	Main Vac valve closed
2/16/2010	2:06:30 PM	Bypass valve closed
2/16/2010	2:06:30 PM	Helium valve opened
2/16/2010	2:06:30 PM	Bubbler valve opened
2/16/2010	2:06:30 PM	Helium MFC set to  500.000000
2/16/2010	2:06:30 PM	H2 MFC set to  0.000000
2/16/2010	2:06:30 PM	BCl3 MFC set to  0.000000
2/16/2010	2:06:30 PM	SiCl4 MFC set to  0.000000
2/16/2010	2:06:30 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:06:30 PM	Tube furnace set to 0
2/16/2010	2:06:30 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:26:30 PM	Helium valve closed
2/16/2010	2:26:30 PM	H2 valve closed
2/16/2010	2:26:30 PM	BCl3 valve closed
2/16/2010	2:26:30 PM	PH3 valve closed
2/16/2010	2:26:30 PM	SiCl4 pre valve closed
2/16/2010	2:26:30 PM	SiCl4 post valve closed
2/16/2010	2:26:30 PM	Main Vac valve closed
2/16/2010	2:26:30 PM	Bypass valve closed
2/16/2010	2:26:30 PM	Bubbler valve closed
2/16/2010	2:26:30 PM	Helium MFC set to  0.000000
2/16/2010	2:26:30 PM	H2 MFC set to  0.000000
2/16/2010	2:26:30 PM	BCl3 MFC set to  0.000000
2/16/2010	2:26:30 PM	SiCl4 MFC set to  0.000000
2/16/2010	2:26:30 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:26:30 PM	Tube furnace set to 0
2/16/2010	2:26:30 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:26:31 PM	Run finished at 2:26 PM
2/16/2010	2:47:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	2:47:19 PM	H2 valve closed
2/16/2010	2:47:19 PM	BCl3 valve closed
2/16/2010	2:47:19 PM	PH3 valve closed
2/16/2010	2:47:19 PM	SiCl4 pre valve closed
2/16/2010	2:47:19 PM	SiCl4 post valve closed
2/16/2010	2:47:19 PM	Main Vac valve closed
2/16/2010	2:47:19 PM	Bypass valve closed
2/16/2010	2:47:19 PM	Bubbler valve closed
2/16/2010	2:47:19 PM	Helium valve opened
2/16/2010	2:47:19 PM	Helium MFC set to  500.000000
2/16/2010	2:47:19 PM	H2 MFC set to  0.000000
2/16/2010	2:47:19 PM	BCl3 MFC set to  0.000000
2/16/2010	2:47:19 PM	SiCl4 MFC set to  0.000000
2/16/2010	2:47:19 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:47:19 PM	Tube furnace set to 0
2/16/2010	2:47:19 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:47:22 PM	Helium valve closed
2/16/2010	2:47:22 PM	H2 valve closed
2/16/2010	2:47:22 PM	BCl3 valve closed
2/16/2010	2:47:22 PM	PH3 valve closed
2/16/2010	2:47:22 PM	SiCl4 pre valve closed
2/16/2010	2:47:22 PM	SiCl4 post valve closed
2/16/2010	2:47:22 PM	Main Vac valve closed
2/16/2010	2:47:22 PM	Bypass valve closed
2/16/2010	2:47:22 PM	Bubbler valve closed
2/16/2010	2:47:22 PM	Helium MFC set to  0.000000
2/16/2010	2:47:22 PM	H2 MFC set to  0.000000
2/16/2010	2:47:22 PM	BCl3 MFC set to  0.000000
2/16/2010	2:47:22 PM	SiCl4 MFC set to  0.000000
2/16/2010	2:47:22 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:47:22 PM	Tube furnace set to 0
2/16/2010	2:47:22 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	2:47:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/16/2010	3:01:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	3:01:54 PM	Helium valve closed
2/16/2010	3:01:54 PM	H2 valve closed
2/16/2010	3:01:54 PM	BCl3 valve closed
2/16/2010	3:01:54 PM	PH3 valve closed
2/16/2010	3:01:54 PM	SiCl4 pre valve closed
2/16/2010	3:01:54 PM	SiCl4 post valve closed
2/16/2010	3:01:54 PM	Main Vac valve closed
2/16/2010	3:01:54 PM	Bubbler valve closed
2/16/2010	3:01:54 PM	Bypass valve opened
2/16/2010	3:01:54 PM	Helium MFC set to  0.000000
2/16/2010	3:01:54 PM	H2 MFC set to  0.000000
2/16/2010	3:01:54 PM	BCl3 MFC set to  0.000000
2/16/2010	3:01:54 PM	SiCl4 MFC set to  0.000000
2/16/2010	3:01:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:01:54 PM	Tube furnace set to 0
2/16/2010	3:01:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:02:24 PM	Helium valve closed
2/16/2010	3:02:24 PM	H2 valve closed
2/16/2010	3:02:24 PM	BCl3 valve closed
2/16/2010	3:02:24 PM	PH3 valve closed
2/16/2010	3:02:24 PM	SiCl4 pre valve closed
2/16/2010	3:02:24 PM	SiCl4 post valve closed
2/16/2010	3:02:24 PM	Bubbler valve closed
2/16/2010	3:02:24 PM	Main Vac valve opened
2/16/2010	3:02:24 PM	Bypass valve opened
2/16/2010	3:02:24 PM	Helium MFC set to  0.000000
2/16/2010	3:02:24 PM	H2 MFC set to  0.000000
2/16/2010	3:02:24 PM	BCl3 MFC set to  0.000000
2/16/2010	3:02:24 PM	SiCl4 MFC set to  0.000000
2/16/2010	3:02:24 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:02:24 PM	Tube furnace set to 0
2/16/2010	3:02:24 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:02:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	3:15:59 PM	Helium MFC set to  50.000000
2/16/2010	3:16:00 PM	Helium valve opened
2/16/2010	3:16:28 PM	Helium MFC set to  0.000000
2/16/2010	3:16:29 PM	Helium valve closed
2/16/2010	3:17:19 PM	Main Vac valve closed
2/16/2010	3:17:21 PM	Bypass valve closed
2/16/2010	3:17:30 PM	Bypass valve opened
2/16/2010	3:17:31 PM	Main Vac valve opened
2/16/2010	3:18:31 PM	Recipe started at 3:18 PM
2/16/2010	3:18:31 PM	Helium valve closed
2/16/2010	3:18:31 PM	BCl3 valve closed
2/16/2010	3:18:31 PM	PH3 valve closed
2/16/2010	3:18:31 PM	SiCl4 pre valve closed
2/16/2010	3:18:31 PM	SiCl4 post valve closed
2/16/2010	3:18:31 PM	Main Vac valve closed
2/16/2010	3:18:31 PM	Bypass valve closed
2/16/2010	3:18:31 PM	Bubbler valve closed
2/16/2010	3:18:31 PM	H2 valve opened
2/16/2010	3:18:31 PM	Helium MFC set to  0.000000
2/16/2010	3:18:31 PM	H2 MFC set to  500.000000
2/16/2010	3:18:31 PM	BCl3 MFC set to  0.000000
2/16/2010	3:18:31 PM	SiCl4 MFC set to  0.000000
2/16/2010	3:18:31 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:18:31 PM	Tube furnace set to 0
2/16/2010	3:18:31 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:19:53 PM	Helium valve closed
2/16/2010	3:19:53 PM	BCl3 valve closed
2/16/2010	3:19:53 PM	PH3 valve closed
2/16/2010	3:19:53 PM	SiCl4 pre valve closed
2/16/2010	3:19:53 PM	SiCl4 post valve closed
2/16/2010	3:19:53 PM	Main Vac valve closed
2/16/2010	3:19:53 PM	Bypass valve closed
2/16/2010	3:19:53 PM	H2 valve opened
2/16/2010	3:19:53 PM	Bubbler valve opened
2/16/2010	3:19:53 PM	Helium MFC set to  0.000000
2/16/2010	3:19:53 PM	H2 MFC set to  500.000000
2/16/2010	3:19:53 PM	BCl3 MFC set to  0.000000
2/16/2010	3:19:53 PM	SiCl4 MFC set to  0.000000
2/16/2010	3:19:53 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:19:53 PM	Tube furnace set to 0
2/16/2010	3:19:53 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:39:53 PM	Helium valve closed
2/16/2010	3:39:53 PM	BCl3 valve closed
2/16/2010	3:39:53 PM	PH3 valve closed
2/16/2010	3:39:53 PM	Main Vac valve closed
2/16/2010	3:39:53 PM	Bypass valve closed
2/16/2010	3:39:53 PM	H2 valve opened
2/16/2010	3:39:53 PM	SiCl4 pre valve opened
2/16/2010	3:39:53 PM	SiCl4 post valve opened
2/16/2010	3:39:53 PM	Bubbler valve opened
2/16/2010	3:39:53 PM	Helium MFC set to  0.000000
2/16/2010	3:39:53 PM	H2 MFC set to  500.000000
2/16/2010	3:39:53 PM	BCl3 MFC set to  0.000000
2/16/2010	3:39:53 PM	SiCl4 MFC set to  325.000000
2/16/2010	3:39:53 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:39:53 PM	Tube furnace set to 0
2/16/2010	3:39:53 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:59:54 PM	H2 valve closed
2/16/2010	3:59:54 PM	BCl3 valve closed
2/16/2010	3:59:54 PM	PH3 valve closed
2/16/2010	3:59:54 PM	SiCl4 pre valve closed
2/16/2010	3:59:54 PM	SiCl4 post valve closed
2/16/2010	3:59:54 PM	Main Vac valve closed
2/16/2010	3:59:54 PM	Bypass valve closed
2/16/2010	3:59:54 PM	Helium valve opened
2/16/2010	3:59:54 PM	Bubbler valve opened
2/16/2010	3:59:54 PM	Helium MFC set to  500.000000
2/16/2010	3:59:54 PM	H2 MFC set to  0.000000
2/16/2010	3:59:54 PM	BCl3 MFC set to  0.000000
2/16/2010	3:59:54 PM	SiCl4 MFC set to  0.000000
2/16/2010	3:59:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	3:59:54 PM	Tube furnace set to 0
2/16/2010	3:59:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:19:54 PM	Helium valve closed
2/16/2010	4:19:54 PM	H2 valve closed
2/16/2010	4:19:54 PM	BCl3 valve closed
2/16/2010	4:19:54 PM	PH3 valve closed
2/16/2010	4:19:54 PM	SiCl4 pre valve closed
2/16/2010	4:19:54 PM	SiCl4 post valve closed
2/16/2010	4:19:54 PM	Main Vac valve closed
2/16/2010	4:19:54 PM	Bypass valve closed
2/16/2010	4:19:54 PM	Bubbler valve closed
2/16/2010	4:19:54 PM	Helium MFC set to  0.000000
2/16/2010	4:19:54 PM	H2 MFC set to  0.000000
2/16/2010	4:19:54 PM	BCl3 MFC set to  0.000000
2/16/2010	4:19:54 PM	SiCl4 MFC set to  0.000000
2/16/2010	4:19:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:19:54 PM	Tube furnace set to 0
2/16/2010	4:19:54 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:19:54 PM	Run finished at 4:19 PM
2/16/2010	4:40:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	4:40:33 PM	Helium valve closed
2/16/2010	4:40:33 PM	H2 valve closed
2/16/2010	4:40:33 PM	BCl3 valve closed
2/16/2010	4:40:33 PM	PH3 valve closed
2/16/2010	4:40:33 PM	SiCl4 pre valve closed
2/16/2010	4:40:33 PM	SiCl4 post valve closed
2/16/2010	4:40:33 PM	Main Vac valve closed
2/16/2010	4:40:33 PM	Bubbler valve closed
2/16/2010	4:40:33 PM	Bypass valve opened
2/16/2010	4:40:33 PM	Helium MFC set to  0.000000
2/16/2010	4:40:33 PM	H2 MFC set to  0.000000
2/16/2010	4:40:33 PM	BCl3 MFC set to  0.000000
2/16/2010	4:40:33 PM	SiCl4 MFC set to  0.000000
2/16/2010	4:40:33 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:40:33 PM	Tube furnace set to 0
2/16/2010	4:40:33 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:41:03 PM	Helium valve closed
2/16/2010	4:41:03 PM	H2 valve closed
2/16/2010	4:41:03 PM	BCl3 valve closed
2/16/2010	4:41:03 PM	PH3 valve closed
2/16/2010	4:41:03 PM	SiCl4 pre valve closed
2/16/2010	4:41:03 PM	SiCl4 post valve closed
2/16/2010	4:41:03 PM	Bubbler valve closed
2/16/2010	4:41:03 PM	Main Vac valve opened
2/16/2010	4:41:03 PM	Bypass valve opened
2/16/2010	4:41:03 PM	Helium MFC set to  0.000000
2/16/2010	4:41:03 PM	H2 MFC set to  0.000000
2/16/2010	4:41:03 PM	BCl3 MFC set to  0.000000
2/16/2010	4:41:03 PM	SiCl4 MFC set to  0.000000
2/16/2010	4:41:03 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:41:03 PM	Tube furnace set to 0
2/16/2010	4:41:03 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:41:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	4:42:55 PM	Helium MFC set to  50.000000
2/16/2010	4:42:56 PM	Helium valve opened
2/16/2010	4:43:46 PM	Helium MFC set to  0.000000
2/16/2010	4:43:47 PM	Helium valve closed
2/16/2010	4:45:12 PM	Helium MFC set to  100.000000
2/16/2010	4:45:12 PM	Helium valve opened
2/16/2010	4:45:50 PM	Helium MFC set to  0.000000
2/16/2010	4:45:51 PM	Helium valve closed
2/16/2010	4:48:27 PM	Main Vac valve closed
2/16/2010	4:48:29 PM	Bypass valve closed
2/16/2010	4:48:46 PM	Bypass valve opened
2/16/2010	4:48:47 PM	Main Vac valve opened
2/16/2010	4:49:40 PM	Recipe started at 4:49 PM
2/16/2010	4:49:40 PM	Helium valve closed
2/16/2010	4:49:40 PM	BCl3 valve closed
2/16/2010	4:49:40 PM	PH3 valve closed
2/16/2010	4:49:40 PM	SiCl4 pre valve closed
2/16/2010	4:49:40 PM	SiCl4 post valve closed
2/16/2010	4:49:40 PM	Main Vac valve closed
2/16/2010	4:49:40 PM	Bypass valve closed
2/16/2010	4:49:40 PM	Bubbler valve closed
2/16/2010	4:49:40 PM	H2 valve opened
2/16/2010	4:49:40 PM	Helium MFC set to  0.000000
2/16/2010	4:49:40 PM	H2 MFC set to  500.000000
2/16/2010	4:49:40 PM	BCl3 MFC set to  0.000000
2/16/2010	4:49:40 PM	SiCl4 MFC set to  0.000000
2/16/2010	4:49:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:49:40 PM	Tube furnace set to 0
2/16/2010	4:49:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:51:00 PM	Helium valve closed
2/16/2010	4:51:00 PM	BCl3 valve closed
2/16/2010	4:51:00 PM	PH3 valve closed
2/16/2010	4:51:00 PM	SiCl4 pre valve closed
2/16/2010	4:51:00 PM	SiCl4 post valve closed
2/16/2010	4:51:00 PM	Main Vac valve closed
2/16/2010	4:51:00 PM	Bypass valve closed
2/16/2010	4:51:00 PM	H2 valve opened
2/16/2010	4:51:00 PM	Bubbler valve opened
2/16/2010	4:51:00 PM	Helium MFC set to  0.000000
2/16/2010	4:51:00 PM	H2 MFC set to  500.000000
2/16/2010	4:51:00 PM	BCl3 MFC set to  0.000000
2/16/2010	4:51:00 PM	SiCl4 MFC set to  0.000000
2/16/2010	4:51:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	4:51:00 PM	Tube furnace set to 0
2/16/2010	4:51:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:11:00 PM	Helium valve closed
2/16/2010	5:11:00 PM	BCl3 valve closed
2/16/2010	5:11:00 PM	PH3 valve closed
2/16/2010	5:11:00 PM	Main Vac valve closed
2/16/2010	5:11:00 PM	Bypass valve closed
2/16/2010	5:11:00 PM	H2 valve opened
2/16/2010	5:11:00 PM	SiCl4 pre valve opened
2/16/2010	5:11:00 PM	SiCl4 post valve opened
2/16/2010	5:11:00 PM	Bubbler valve opened
2/16/2010	5:11:00 PM	Helium MFC set to  0.000000
2/16/2010	5:11:00 PM	H2 MFC set to  500.000000
2/16/2010	5:11:00 PM	BCl3 MFC set to  0.000000
2/16/2010	5:11:00 PM	SiCl4 MFC set to  325.000000
2/16/2010	5:11:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:11:00 PM	Tube furnace set to 0
2/16/2010	5:11:00 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:31:01 PM	H2 valve closed
2/16/2010	5:31:01 PM	BCl3 valve closed
2/16/2010	5:31:01 PM	PH3 valve closed
2/16/2010	5:31:01 PM	SiCl4 pre valve closed
2/16/2010	5:31:01 PM	SiCl4 post valve closed
2/16/2010	5:31:01 PM	Main Vac valve closed
2/16/2010	5:31:01 PM	Bypass valve closed
2/16/2010	5:31:01 PM	Helium valve opened
2/16/2010	5:31:01 PM	Bubbler valve opened
2/16/2010	5:31:01 PM	Helium MFC set to  500.000000
2/16/2010	5:31:01 PM	H2 MFC set to  0.000000
2/16/2010	5:31:01 PM	BCl3 MFC set to  0.000000
2/16/2010	5:31:01 PM	SiCl4 MFC set to  0.000000
2/16/2010	5:31:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:31:01 PM	Tube furnace set to 0
2/16/2010	5:31:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:51:01 PM	Helium valve closed
2/16/2010	5:51:01 PM	H2 valve closed
2/16/2010	5:51:01 PM	BCl3 valve closed
2/16/2010	5:51:01 PM	PH3 valve closed
2/16/2010	5:51:01 PM	SiCl4 pre valve closed
2/16/2010	5:51:01 PM	SiCl4 post valve closed
2/16/2010	5:51:01 PM	Main Vac valve closed
2/16/2010	5:51:01 PM	Bypass valve closed
2/16/2010	5:51:01 PM	Bubbler valve closed
2/16/2010	5:51:01 PM	Helium MFC set to  0.000000
2/16/2010	5:51:01 PM	H2 MFC set to  0.000000
2/16/2010	5:51:01 PM	BCl3 MFC set to  0.000000
2/16/2010	5:51:01 PM	SiCl4 MFC set to  0.000000
2/16/2010	5:51:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:51:01 PM	Tube furnace set to 0
2/16/2010	5:51:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:51:01 PM	Run finished at 5:51 PM
2/16/2010	5:58:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	5:58:12 PM	Helium valve closed
2/16/2010	5:58:12 PM	H2 valve closed
2/16/2010	5:58:12 PM	BCl3 valve closed
2/16/2010	5:58:12 PM	PH3 valve closed
2/16/2010	5:58:12 PM	SiCl4 pre valve closed
2/16/2010	5:58:12 PM	SiCl4 post valve closed
2/16/2010	5:58:12 PM	Main Vac valve closed
2/16/2010	5:58:12 PM	Bubbler valve closed
2/16/2010	5:58:12 PM	Bypass valve opened
2/16/2010	5:58:12 PM	Helium MFC set to  0.000000
2/16/2010	5:58:12 PM	H2 MFC set to  0.000000
2/16/2010	5:58:12 PM	BCl3 MFC set to  0.000000
2/16/2010	5:58:12 PM	SiCl4 MFC set to  0.000000
2/16/2010	5:58:12 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:58:12 PM	Tube furnace set to 0
2/16/2010	5:58:12 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:58:40 PM	Helium valve closed
2/16/2010	5:58:40 PM	H2 valve closed
2/16/2010	5:58:40 PM	BCl3 valve closed
2/16/2010	5:58:40 PM	PH3 valve closed
2/16/2010	5:58:40 PM	SiCl4 pre valve closed
2/16/2010	5:58:40 PM	SiCl4 post valve closed
2/16/2010	5:58:40 PM	Bubbler valve closed
2/16/2010	5:58:40 PM	Main Vac valve opened
2/16/2010	5:58:40 PM	Bypass valve opened
2/16/2010	5:58:40 PM	Helium MFC set to  0.000000
2/16/2010	5:58:40 PM	H2 MFC set to  0.000000
2/16/2010	5:58:40 PM	BCl3 MFC set to  0.000000
2/16/2010	5:58:40 PM	SiCl4 MFC set to  0.000000
2/16/2010	5:58:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:58:40 PM	Tube furnace set to 0
2/16/2010	5:58:40 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	5:58:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	6:00:52 PM	Main Vac valve closed
2/16/2010	6:00:54 PM	Bypass valve closed
2/16/2010	6:00:59 PM	Helium MFC set to  100.000000
2/16/2010	6:01:00 PM	Helium valve opened
2/16/2010	6:03:49 PM	Helium MFC set to  0.000000
2/16/2010	6:03:50 PM	Helium valve closed
2/16/2010	6:04:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	6:04:01 PM	Helium valve closed
2/16/2010	6:04:01 PM	H2 valve closed
2/16/2010	6:04:01 PM	BCl3 valve closed
2/16/2010	6:04:01 PM	PH3 valve closed
2/16/2010	6:04:01 PM	SiCl4 pre valve closed
2/16/2010	6:04:01 PM	SiCl4 post valve closed
2/16/2010	6:04:01 PM	Main Vac valve closed
2/16/2010	6:04:01 PM	Bubbler valve closed
2/16/2010	6:04:01 PM	Bypass valve opened
2/16/2010	6:04:01 PM	Helium MFC set to  0.000000
2/16/2010	6:04:01 PM	H2 MFC set to  0.000000
2/16/2010	6:04:01 PM	BCl3 MFC set to  0.000000
2/16/2010	6:04:01 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:04:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:04:01 PM	Tube furnace set to 0
2/16/2010	6:04:01 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:04:17 PM	Helium valve closed
2/16/2010	6:04:17 PM	H2 valve closed
2/16/2010	6:04:17 PM	BCl3 valve closed
2/16/2010	6:04:17 PM	PH3 valve closed
2/16/2010	6:04:17 PM	SiCl4 pre valve closed
2/16/2010	6:04:17 PM	SiCl4 post valve closed
2/16/2010	6:04:17 PM	Bubbler valve closed
2/16/2010	6:04:17 PM	Main Vac valve opened
2/16/2010	6:04:17 PM	Bypass valve opened
2/16/2010	6:04:17 PM	Helium MFC set to  0.000000
2/16/2010	6:04:17 PM	H2 MFC set to  0.000000
2/16/2010	6:04:17 PM	BCl3 MFC set to  0.000000
2/16/2010	6:04:17 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:04:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:04:17 PM	Tube furnace set to 0
2/16/2010	6:04:17 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:04:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	6:05:01 PM	Main Vac valve closed
2/16/2010	6:05:03 PM	Bypass valve closed
2/16/2010	6:05:20 PM	Bypass valve opened
2/16/2010	6:05:22 PM	Main Vac valve opened
2/16/2010	6:06:22 PM	Recipe started at 6:06 PM
2/16/2010	6:06:22 PM	Helium valve closed
2/16/2010	6:06:22 PM	BCl3 valve closed
2/16/2010	6:06:22 PM	PH3 valve closed
2/16/2010	6:06:22 PM	SiCl4 pre valve closed
2/16/2010	6:06:22 PM	SiCl4 post valve closed
2/16/2010	6:06:22 PM	Main Vac valve closed
2/16/2010	6:06:22 PM	Bypass valve closed
2/16/2010	6:06:22 PM	Bubbler valve closed
2/16/2010	6:06:22 PM	H2 valve opened
2/16/2010	6:06:22 PM	Helium MFC set to  0.000000
2/16/2010	6:06:22 PM	H2 MFC set to  500.000000
2/16/2010	6:06:22 PM	BCl3 MFC set to  0.000000
2/16/2010	6:06:22 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:06:22 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:06:22 PM	Tube furnace set to 0
2/16/2010	6:06:22 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:07:41 PM	Helium valve closed
2/16/2010	6:07:41 PM	BCl3 valve closed
2/16/2010	6:07:41 PM	PH3 valve closed
2/16/2010	6:07:41 PM	SiCl4 pre valve closed
2/16/2010	6:07:41 PM	SiCl4 post valve closed
2/16/2010	6:07:41 PM	Main Vac valve closed
2/16/2010	6:07:41 PM	Bypass valve closed
2/16/2010	6:07:41 PM	H2 valve opened
2/16/2010	6:07:41 PM	Bubbler valve opened
2/16/2010	6:07:41 PM	Helium MFC set to  0.000000
2/16/2010	6:07:41 PM	H2 MFC set to  500.000000
2/16/2010	6:07:41 PM	BCl3 MFC set to  0.000000
2/16/2010	6:07:41 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:07:41 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:07:41 PM	Tube furnace set to 0
2/16/2010	6:07:41 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:25:42 PM	Helium valve closed
2/16/2010	6:25:42 PM	BCl3 valve closed
2/16/2010	6:25:42 PM	PH3 valve closed
2/16/2010	6:25:42 PM	Main Vac valve closed
2/16/2010	6:25:42 PM	Bypass valve closed
2/16/2010	6:25:42 PM	H2 valve opened
2/16/2010	6:25:42 PM	SiCl4 pre valve opened
2/16/2010	6:25:42 PM	SiCl4 post valve opened
2/16/2010	6:25:42 PM	Bubbler valve opened
2/16/2010	6:25:42 PM	Helium MFC set to  0.000000
2/16/2010	6:25:42 PM	H2 MFC set to  500.000000
2/16/2010	6:25:42 PM	BCl3 MFC set to  0.000000
2/16/2010	6:25:42 PM	SiCl4 MFC set to  325.000000
2/16/2010	6:25:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:25:42 PM	Tube furnace set to 0
2/16/2010	6:25:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:35:42 PM	H2 valve closed
2/16/2010	6:35:42 PM	BCl3 valve closed
2/16/2010	6:35:42 PM	PH3 valve closed
2/16/2010	6:35:42 PM	SiCl4 pre valve closed
2/16/2010	6:35:42 PM	SiCl4 post valve closed
2/16/2010	6:35:42 PM	Main Vac valve closed
2/16/2010	6:35:42 PM	Bypass valve closed
2/16/2010	6:35:42 PM	Helium valve opened
2/16/2010	6:35:42 PM	Bubbler valve opened
2/16/2010	6:35:42 PM	Helium MFC set to  500.000000
2/16/2010	6:35:42 PM	H2 MFC set to  0.000000
2/16/2010	6:35:42 PM	BCl3 MFC set to  0.000000
2/16/2010	6:35:42 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:35:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:35:42 PM	Tube furnace set to 0
2/16/2010	6:35:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:45:43 PM	Helium valve closed
2/16/2010	6:45:43 PM	H2 valve closed
2/16/2010	6:45:43 PM	BCl3 valve closed
2/16/2010	6:45:43 PM	PH3 valve closed
2/16/2010	6:45:43 PM	SiCl4 pre valve closed
2/16/2010	6:45:43 PM	SiCl4 post valve closed
2/16/2010	6:45:43 PM	Main Vac valve closed
2/16/2010	6:45:43 PM	Bypass valve closed
2/16/2010	6:45:43 PM	Bubbler valve closed
2/16/2010	6:45:43 PM	Helium MFC set to  0.000000
2/16/2010	6:45:43 PM	H2 MFC set to  0.000000
2/16/2010	6:45:43 PM	BCl3 MFC set to  0.000000
2/16/2010	6:45:43 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:45:43 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:45:43 PM	Tube furnace set to 0
2/16/2010	6:45:43 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:45:43 PM	Run finished at 6:45 PM
2/16/2010	6:49:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	6:49:19 PM	Helium valve closed
2/16/2010	6:49:19 PM	H2 valve closed
2/16/2010	6:49:19 PM	BCl3 valve closed
2/16/2010	6:49:19 PM	PH3 valve closed
2/16/2010	6:49:19 PM	SiCl4 pre valve closed
2/16/2010	6:49:19 PM	SiCl4 post valve closed
2/16/2010	6:49:19 PM	Main Vac valve closed
2/16/2010	6:49:19 PM	Bubbler valve closed
2/16/2010	6:49:19 PM	Bypass valve opened
2/16/2010	6:49:19 PM	Helium MFC set to  0.000000
2/16/2010	6:49:19 PM	H2 MFC set to  0.000000
2/16/2010	6:49:19 PM	BCl3 MFC set to  0.000000
2/16/2010	6:49:19 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:49:19 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:49:19 PM	Tube furnace set to 0
2/16/2010	6:49:19 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:50:06 PM	Program started after a nonstandard shutdown
2/16/2010	6:50:06 PM	Helium valve closed
2/16/2010	6:50:06 PM	H2 valve closed
2/16/2010	6:50:06 PM	BCl3 valve closed
2/16/2010	6:50:06 PM	PH3 valve closed
2/16/2010	6:50:06 PM	SiCl4 pre valve closed
2/16/2010	6:50:06 PM	SiCl4 post valve closed
2/16/2010	6:50:06 PM	Main Vac valve closed
2/16/2010	6:50:06 PM	Bypass valve closed
2/16/2010	6:50:06 PM	Bubbler valve closed
2/16/2010	6:50:06 PM	Helium MFC set to  0.000000
2/16/2010	6:50:06 PM	H2 MFC set to  0.000000
2/16/2010	6:50:06 PM	BCl3 MFC set to  0.000000
2/16/2010	6:50:06 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:50:06 PM	Bypass solenoid MFC set to  760.000000
2/16/2010	6:50:06 PM	Tube furnace set to 0
2/16/2010	6:50:06 PM	Bypass solenoid MFC set to  760.000000
2/16/2010	6:51:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/16/2010	6:51:11 PM	Helium valve closed
2/16/2010	6:51:11 PM	H2 valve closed
2/16/2010	6:51:11 PM	BCl3 valve closed
2/16/2010	6:51:11 PM	PH3 valve closed
2/16/2010	6:51:11 PM	SiCl4 pre valve closed
2/16/2010	6:51:11 PM	SiCl4 post valve closed
2/16/2010	6:51:11 PM	Main Vac valve closed
2/16/2010	6:51:11 PM	Bubbler valve closed
2/16/2010	6:51:11 PM	Bypass valve opened
2/16/2010	6:51:11 PM	Helium MFC set to  0.000000
2/16/2010	6:51:11 PM	H2 MFC set to  0.000000
2/16/2010	6:51:11 PM	BCl3 MFC set to  0.000000
2/16/2010	6:51:11 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:51:11 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:51:11 PM	Tube furnace set to 0
2/16/2010	6:51:11 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:51:42 PM	Helium valve closed
2/16/2010	6:51:42 PM	H2 valve closed
2/16/2010	6:51:42 PM	BCl3 valve closed
2/16/2010	6:51:42 PM	PH3 valve closed
2/16/2010	6:51:42 PM	SiCl4 pre valve closed
2/16/2010	6:51:42 PM	SiCl4 post valve closed
2/16/2010	6:51:42 PM	Bubbler valve closed
2/16/2010	6:51:42 PM	Main Vac valve opened
2/16/2010	6:51:42 PM	Bypass valve opened
2/16/2010	6:51:42 PM	Helium MFC set to  0.000000
2/16/2010	6:51:42 PM	H2 MFC set to  0.000000
2/16/2010	6:51:42 PM	BCl3 MFC set to  0.000000
2/16/2010	6:51:42 PM	SiCl4 MFC set to  0.000000
2/16/2010	6:51:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:51:42 PM	Tube furnace set to 0
2/16/2010	6:51:42 PM	Bypass solenoid MFC set to  0.000000
2/16/2010	6:51:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
